3M氟化液FC-3283是無色透明全氟化學品，具有良好的化學惰性、電氣絕緣性能、熱傳導性和獨特的第表面張力廣泛應用于半導體制造廠作為熱傳導介質。其液體溫度范圍為-50°C 至128°C，主要應用于蝕刻設備、離子注入設備、測試設備及其他設備。因為FC-3283是單一組分，所以其成分不好出現降解或者過期。FC-3283沸點高，其隨時間的揮發也比較少。
3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.
Physical Properties物理化學性質
Properties |
|
|
Appearance外觀 |
無色透明 |
|
Average Molecular Weight平均分子量 |
521 |
|
Boiling Point (1 atm)沸點 |
128℃ |
|
Pour Point傾點 |
﹣50℃ |
|
Estimated Critical Temperature高承受溫度 |
543 K |
|
Estimated Critical Pressure高承受壓力 |
1180000pa |
|
Vapor Pressure蒸汽壓 |
1440pa |
|
Latent Heat of Vaporization (at normal boiling point揮發潛熱 |
78J/g |
|
Liquid Density液體密度 |
1820kg/m3 |
|
Kinematic Viscosity運動粘度 |
0.75 centipoise |
|
Absolute Viscosity粘度 |
1.8centipoise |
|
Liquid Speci?c Heat比熱 |
1100 J/ kg°C |
|
Liquid Thermal Conductivity導熱率 |
0.066 W/ m°C |
|
Coef?cient of Expansion膨脹系數 |
0.0012 /°C |
|
Refractive Index折光率 |
1.290 |
|
Water Solubility溶水能力 |
<7 ppm |
|
Solubility in Water水中溶解力 |
<5 ppm |
|
Ozone Depletion Potential臭氧破壞潛值 |
0 |
|
Dielectric Strength介電強度 |
43 kV, 0.1" gap |
|
Dielectric Constant介電常數 |
1.89 |
|
Electrical Resistivity絕緣強度 |
5.0 x 10(15)ohm cm |
Not for speci?cation purposes All values determined at 25°C unless otherwise speci?ed
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